2220 Campus Drive
Cook Hall, 4026
Evanston, IL 60208United States of Americahttp://www.mrsec.northwestern.edu/content/facilities/cleanroom.htm
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Last Updated: 06/20/2016
The Materials Research Center (MRC) cleanroom facility is devoted to materials processing, growth, device fabrication, characterization and electronic & photonicÂ materials. The MRC cleanroom complex in Cook Hall provides microfabrication and thin film processing capabilities. Facility includes class 100 and 1000 cleanrooms. The facility provides microfabrication tools for general use by the Northwestern community, government and industrial researchers. Various techniques are available for the growth, preparation and processing of a wide range of thin film materials including in-process characterization. Training of equipment and assisted use within the facility is available to provide the necessary expertise.
This provides a centralized resource for the deposition of metal, semiconductor & dielectric thin films, photolithography, and processing. Standardmicrofabricationprocesses have been established. Available techniques include plasma enhanced chemical vapor deposition, e-beam evaporation, atomic layer deposition, reactive ion etching, photolithography, bonding, rapid thermal processing, Hall Effect Measurement and some characterization instrumentation.
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