The CoreMarketplace: Cleanroom & Nanofabrication

Colorado School of Mines

golden, CO

United States of America

https://www.mines.edu/shared-facilities/

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Primary Contact:

Alex Dixon

Last Updated: 07/11/2022

Facility RRID

RRID:SCR_022047

Facility Details

This facility houses cleanrooms with processing equipment for making and characterizing electronic devices, thin film deposition tools for the creation of metallic and ceramic thin film devices, and a characterization lab with tools for the surface, morphological, and optical characterization of materials.

Facility Policies

Services are offerred outside of Colorado School of Mines

Consulting is offerred outside of Colorado School of Mines

Services offered:

Facility Equipment

SUSS MicroTek MA6/BA6 Mask Aligner

MA/BA6 mask aligner is designed for all standard lithography applications and wafer sizes of up to 150 mm. For thick-resist MEMS applications, the MA/BA6 offers high resolution and optimum edge quality. The bottom side alignment option allows for pattern printing on both sides of the substrate. The MA/BA6 additionally provides tailored features for fragile III-V compounds, thinned or warped wafers, transparent substrates and pieces or single dies. [Product Link]

RRID:SCR_020533

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No additional equipment has been listed

Publications

No publications have been associated with this facility

Associations

Metadata

Links

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https://coremarketplace.org/?FacilityID=1325
https://coremarketplace.org/RRID:SCR_022047

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Keywords:

USEDit, ABRF

Resource Type:

access service resource, service resource, core facility

Citation:

Colorado School of Mines Shared Instrumentation Facility Cleanroom and Thin Film Processing Core Facility (RRID:SCR_022047)

Cleanroom & Nanofabrication (Clean Room)

Primary Contact:

Facility RRID

Facility Details

Facility Policies

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Services offered:

Facility Equipment

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Publications

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Associations

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Metadata

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