Facility Details

The AggieFab Nanofabrication Facility is a shared nano/microfabrication facility located on the 1st floor of the Frederick E. Giesecke Engineering Research Building at Texas A&M University. The facility has over 6,500 sq. ft. of class 100/1000 cleanroom space with a raised access floor and vertical laminar flow. There is an additional 4,500 sq. ft. of support space, totaling 11,000 sq. ft. AggieFab houses state-of-the-art equipment for a wide range of micro- and nanoscale fabrication of diverse materials. In addition to the purchase of new nanofabrication tools, the facility acquired $5 M nanopatterning and deposition equipment through a donation from Hewlett Packard Enterprise (HPE). These include a Zeiss Orion Helium Ion Microscope/Nanofab, FEI Helios DualBeam Focused Ion Beam (FIB), ASM Atomic Layer Deposition (ALD) tool, and a Clustex Multi-target deposition tool. The facility also has recently received $1.5 M from the Texas A&M University Research Development Fund to purchase an Oxford Estrelas DRIE tool and Heidelberg MLA150 Maskless Lithography tool to provide advanced substrate development capabilities. The main supporters of the facility are the Department of Electrical and Computer Engineering, TEES, and the Office of the Vice President for Research.