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All Facilities >> Michigan Technological University >> Materials Characterization and Fabrication Facility(MCFF) (Materials Characterization)
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Murphy Mallow
Elizabeth Miller
The Materials Characterization facility is a major research instrumentation facility at Michigan Tech available to the University Community and external clients including for profit academic and non profit organizations.
Services are offerred outside of
Consulting is offerred outside of Michigan Technological University
Last Updated: 01/20/2026
Asylum MFP 3D Atomic Force Microscope
MFP-3D Infinity is used for routine imaging tasks and can support your most ambitious projects. [Product Link]
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Hitachi S4700 Field Emission Scanning Electron Microscope
Hitachi S-4700 is a field emission scanning electron microscope (FE-SEM). More than a standard SEM, the S-4700, under optimal conditions, can magnify images upwards of 500,000 times and resolve features to 2 nanometers. In addition, a cathodoluminescence detector, backscatter electron detector and energy dispersive x-ray spectrographic detector accompany the microscope. [Product Link]
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Horiba FluoroMax 4 Spectrofluorometer
FluoroMax family, with its all reflective optics and photon counting was the first to bring the sensitivity of a modular fluorometer to a tabletop fluorescence instrument. It's a compact spectrofluorometer, yet offers the ultimate sensitivity in fluorescence investigations as well as features not found in most table-top fluorescence detection systems. The FluoroMax series consists of the FluoroMax-4, the latest generation of the original, high performance tabletop fluorometer, which offers extended performance with detection of emission spectra out to 1700 nm and (TCSPC) Time Correlated Single Photon Counting lifetime measurements as short as 25ps. [Product Link]
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2 Inch Tube Furnace
This system is capable of heating wafer samples in an atmosphere of oxygen or nitrogen. Can process sample scale dies.
Denton DV-502A
Water-cooled crucible holder that can hold four 7cc crucible liners Six-inch rotatable substrate holder Quartz crystal thickness monitor Current source materials: Co, Ni, Fe, Pt, Ti, SiO2, Cr, Au, Al, Si, and Cu
EV620 Aligner
The EV620 aligner performs pattern transfer into photoresist on a substrate using ultraviolet light.
Filmetrics 3D Profilometer
The profilometer capable of measuring the 3d surface of a wafer to determine feature size and dimension.
JA Woollam V-VASE Spectroscopic Ellipsometer
The ellipsometer is capable of measuring film thicknesses and index of refraction of stacks of thin films including dielectrics.
K and S Wire Bonder
The K and S wire bonder is capable of performing wire bonds in gold between pads on the sample to a package.
Laurell Spin Station
The spin station is capable of spinning wafers for the purpose of evenly applying photoresist and polymers to wafer surface.
Mellan Furnace 2
his system is capable of heating wafer samples in an atmosphere of oxygen or nitrogen. Can process 6" substates. This is primarily a gate oxidation furnace.
Mellen Furnace 1
his system is capable of heating wafer samples in an atmosphere of oxygen or nitrogen. Can process 6" substates. This is used for oxidation and diffusion.
Micromanipulator Probe Station
The Micromanipulator Probe Station capable of 8" wafers. Configured for individual probe manipulators or circular probe cards.
Perkin-Elmer 2400 6” Sputtering Tool
The Perkin-Elmer sputtering tool has the ability to have up to three different 6” targets loaded at one time. The tool uses an RF power source for sputtering and currently has argon, and oxygen for reactive sputtering.
Perkin-Elmer 2400 8” Sputtering Tool
The Perkin-Elmer sputtering tool has the ability to have up to three 8” targets loaded at once. The tool uses an RF power source for sputtering and currently has argon, oxygen, and nitrogen gases for reactive sputtering.
PHI 5800 X-ray Photoelectron Spectrometer
The PHI 5800 X-ray photoelectron spectrometer (XPS) is equipped with a dual source anode (Al and Mg), a hemispherical analyzer for XPS and Auger electron spectroscopy (AES) analysis, including elemental mapping capabilities, an electron gun source for AES analysis, an ion sputter gun for depth profiling, and stage tilting for angle-resolved XPS. The XPS was generously donated by the Army Research Laboratories with help from the Department of Chemistry at Michigan Tech.
Scintag XDS-2000 PTS
The Scintag XDS2000 a 3-axis Pole figure, Texture, and Stress (PTS) horizontal goniometer configured with an LN2 cooled germanium semiconductor detector and IBM compatible workstation running Scintag XDS software in Windows NT environment.
Scintag XDS2000 Powder Diffractometer
The Scintag XDS2000 powder diffractometer is configured with a graphite monochromater and IBM compatible workstation running Scintag DMSNT software in Windows NT environment.
Solar Simulator
The solar simulator is capable of simulating sunlight for the purpose of testing solar panels.
Trion Phantom II RIE/ICP
The RIE/ICP etcher is capable of etching wafers using flourine plasma gas reactions.
Xenemetrix EX-6600 EDS
Xenemetrix (formerly Jordan Valley) EX-6600 energy dispersive XRF is an automated energy dispersive spectrometer. The unit has a low power rhodium X-ray tube to efficiently excite elements throughout the periodic table. It utilizes a combination of 8 filters and 8 secondary targets to enhance elemental analysis. Windows software permits ease of operation.
CEM Corporation Mars 6 Microwave Digestion System
The CEM MARS 6 is an advanced microwave digestion system used in laboratories to prepare a wide range of samples for elemental analysis, such as in food, soil, and pharmaceuticals. Key features include intelligent vessel recognition, contactless temperature monitoring via iWave® sensors, and software with hundreds of pre-programmed methods for ease of use and safety.
Cole-Parmer Spex SamplePrep 8000M Mixer/Mill
The SPEX SamplePrep 8000M Mixer/Mill is a high-energy ball mill designed to pulverize, grind, blend, and mix laboratory samples, including hard and brittle materials like rocks and ceramics, or softer materials like plant and animal tissues. It achieves this by holding a sample and grinding media (balls) in a vial and shaking it with a high-velocity figure-eight motion, generating high G-forces to mill the sample to analytical fineness.
Costech Analytical Technologies, Inc. Elemental Combustion System 4010
The Costech Analytical Elemental Combustion System (ECS) 4010 is an instrument that analyzes the elemental composition of a sample, particularly solid and liquid materials. It does this by combusting the sample and then using gas chromatography (GC) to separate the resulting gases before they are detected, providing a precise measurement of the percentage of carbon, nitrogen, hydrogen, and sulfur (CHNS).
Keyence VHX S770E
The Keyence VHX-S770E is a powerful digital microscope system featuring a motorized XYZ stage for automated, precise positioning, a high-resolution 4K camera (often paired with a VHX-7020 controller) for detailed imaging, and advanced lighting for glare reduction, offering 20x to 2500x magnification for applications like electronics, failure analysis, and metallurgy.
KLA Buehler VH3100
Automated micro vickers indenter for high through put hardness measurements. Can be used for individual measurements or measuring across large areas.
KLA iMicro Nanoindenter
High precision nano indenter with displacement and load measurements. Hardness, elastic modulus, elevated temperature experiments, multi point measurements, nanoscale measurements
Mettler Toledo XP26 Micro Balance
The Mettler Toledo XP26 Micro Balance is a high-precision laboratory micro-balance designed for extremely fine weighing tasks. The XP26 model (or sometimes described as the “Excellence Plus XP26” / “Dual Range XP26” / “DeltaRange XP26”) supports very small resolution (decimal micrograms) while still having a weighing capacity up to tens of grams. It’s intended for applications where very small masses must be measured with high accuracy, for example, research labs, pharmaceutical dosing, chemical analysis, and maybe formulation of small sample amounts.
Olympus FluoView FV1000 Confocal Microsope
The Olympus FluoView FV1000 Confocal Microscope is a laser scanning biological microscope. It minimizes specimen damage during high-speed imaging of living organisms. It accurately captures a full range of related information.
Perkin Elmer Optima 7000DV ICP-OES
The Optima 7000 DV is an Inductively Coupled Plasma Optical Emission Spectroscopy (ICP-OES) instrument from PerkinElmer designed for high-performance elemental analysis of aqueous and other sample types. It uses a plasma to excite atoms, which then emit light; the system measures the intensity of that light at characteristic wavelengths to determine elemental concentrations.
Perkin Elmer PHI-660 Scanning Auger Microscope
The Perkin Elmer PHI-660 scanning Auger microprobe can be used for the compositional analysis of specimen surfaces using Auger electron spectroscopy (AES). The probe depth of AES is on the order of only a few atomic layers, making it possible to execute compositional analysis with sub micron spatial resolution. AES is capable of detecting elements with atomic number three through fifty, but it is more sensitive to lighter elements. Additionally, the depth distribution of components at and near the surface can be determined using AES in conjunction with inert ion sputtering. The microprobe software package includes AugerScan, for auger electron acquisition and data manipulation, and AugerMap, for scan control and element mapping.
Sartorious AG M3P Microbalance
he Sartorius M3P is a high-precision, electronic microbalance designed for accurately weighing small samples in laboratory settings. A protective glass or metal enclosure that reduces air currents and other environmental factors that can cause weighing errors
SP Scientific VirTis AdVantage Freeze Dryer
The VirTis AdVantage Freeze Dryer is a line of benchtop lyophilizers (freeze dryers) designed for applications in biotechnology, pharmaceutical, and food processing. These systems use vacuum technology to remove water from frozen samples by sublimation, which preserves the biological and chemical integrity of the material. The AdVantage models are known for their high performance, including customizable shelf configurations, intuitive controls like touchscreen displays, and the ability to process various products such as bulk goods, stoppered vials, and 96-well plates.
Thermo Fisher Scientific DeltaV plus IRMS system
The DELTA V Plus is an isotope-ratio mass spectrometer (IRMS) manufactured by Thermo Scientific (part of Thermo Fisher). It is designed to measure stable isotope ratios in gases derived from sample preparation systems. Available peripherals are the Flash IRMS EA IsoLink OH, Flash IRMS EA IsoLink CN, GasBench II, and PreCon.
Thermo Scientific 2D LC-High Resolution Orbitrap Elite Mass Spectrometry
The Thermo Scientific Orbitrap Elite Hybrid Mass Spectrometer (when coupled in a 2-D LC – high-resolution MS workflow) is a high-end analytical instrument used for deep characterization of complex mixtures. Below is a breakdown of what the system is, how it works, what its capabilities are, and where it is commonly used.
Thermo Scientific ISQ7610 GC-MS Single Quadrupole
The ISQ 7610 GC-MS system offers excellent quantitative performance with femtogram-level sensitivity, ensuring consistent detection limits whether in SIM mode or Full Scan. Its unique ion path allows sensitivity and reproducible operation, while the XLXR detector extends detector lifetime and dynamic range, allowing simultaneous analysis of low- and high-concentration compounds. The system supports multiple workflows with the intuitive Thermo Scientific Chromeleon CDS and ready-to-use eWorkflows, including specialized templates for regulatory applications. Designed for full-time productivity, the ISQ 7610 minimizes maintenance with high matrix tolerance. Ease of use is further enhanced by automated software for various workflows and user-centric innovations, such as instrument health monitoring, ensuring efficient operation.
Thermo Scientific ISQ7610 GC-MS Single Quadrupole
The ISQ 7610 GC-MS system offers excellent quantitative performance with femtogram-level sensitivity, ensuring consistent detection limits whether in SIM mode or Full Scan. Its unique ion path allows sensitivity and reproducible operation, while the XLXR detector extends detector lifetime and dynamic range, allowing simultaneous analysis of low- and high-concentration compounds. The system supports multiple workflows with the intuitive Thermo Scientific Chromeleon CDS and ready-to-use eWorkflows, including specialized templates for regulatory applications. Designed for full-time productivity, the ISQ 7610 minimizes maintenance with high matrix tolerance. Ease of use is further enhanced by automated software for various workflows and user-centric innovations, such as instrument health monitoring, ensuring efficient operation.
Turner Designs 10-AU Fluoromater
Chlorophyll a: The AQUA Lab extracts chlorophyll a pigments concentrated on filters using an ethanol extraction, and then measures chlorophyll a on a Turner 10-AU fluorometer. We use the Welschmeyer method, which uses specific filters that read chlorophyll a in the presence of chlorophyll b and pheophytins. Sample acidification is not necessary with this method.
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https://coremarketplace.org/?FacilityID=5732Institution
Institution ROR ID: https://ror.org/0036rpn28Keywords:
ABRF, imaging, analysis, environmental testing, micro, nano, fabrication
Resource Type:
access service resource, core facility, service resource
Citation:
Michigan Technological University Materials Characterization and Fabrication Core Facility (RRID:SCR_027872)

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