Texas A&M University

Contact Info:

Sandra Malhotra

Giesecke Engineering Research Building

1617 Research Parkway

College Station, TX 77843

https://aggiefab.tamu.edu/

Grants and Identifiers:

RRID: RRID:SCR_023639

Instrumentation:

Services Provided:

3D Printing

Annealing Furnace

Atomic Layer Deposition

Consultations

Electron Beam Lithography

Electron Microscopy

Ellipsometry

Focused Ion Beam (FIB)

Low Pressure Chemical Deposition

Nanofabrication

Optical Imaging

Photolithography

Physical Vapor Deposition

Reactive Ion Etching

Surface Roughness

Wafer Bonding

Wafer Dicing

Wire Bonding

Relevant Publications:

1.) Wang Y, Rodriguez C, Alden SE, Choi MH, Alanis K, Srinivasan R, Baker LA (2024 Dec 11). Electrochemical imaging of neurotransmitter release with fast-scan voltammetric ion conductance microscopy Science Advances, 10(50), eado9322. . PMCID: 11633752.

2.) Vernon KL, Pungsrisai T, Wahab OJ, Alden SE, Zhong Y, Choi MH, Verma E, Bentley AK, Bailey KO, Skrabalak SE, Ye X, Willets KA, Baker LA (2024 Oct 8). Optically Transparent Carbon Electrodes for Single Entity Electrochemistry ACS Electrochemistry, 1(1), 93-102. . PMCID: 11728714.

3.) Han JJ, Zhang H, Li Y, Huang C, Guzman AR, Han A (2024 Aug 15). High-Efficiency Interdigitated Electrode-Based Droplet Merger for Enabling Error-Free Droplet Microfluidic Systems. Analytical chemistry, 96(34), 13906-15. . PMID: 39146475.

4.) Cherukuri R, Kammala AK, Thomas TJ, Saylor L, Richardson L, Kim S, Ferrer M, Acedo C, Song MJ, Gaharwar AK, Menon R, Han A (2024 Aug 14). High-Throughput 3D-Printed Model of the Feto-Maternal Interface for the Discovery and Development of Preterm Birth Therapies. ACS applied materials & interfaces, 16(32), 41892-41906. . PMID: 39078878.

5.) Alden SE, Zhang L, Wang Y, Lavrik NV, Thorgaard SN, Baker LA (2024 May 23). High-Throughput Single-Entity Electrochemistry with Microelectrode Arrays Analytical Chemistry, 96(22), 9177-9184. . PMCID: 11154736.

Description:

The AggieFab Nanofabrication Facility is a shared nano/microfabrication facility located on the 1st floor of the Frederick E. Giesecke Engineering Research Building at Texas A&M University. The facility has over 6,500 sq. ft. of class 100/1000 cleanroom space with a raised access floor and vertical laminar flow. There is an additional 4,500 sq. ft. of support space, totaling 11,000 sq. ft. AggieFab houses state-of-the-art equipment for a wide range of micro- and nanoscale fabrication of diverse materials. In addition to the purchase of new nanofabrication tools, the facility acquired $5 M nanopatterning and deposition equipment through a donation from Hewlett Packard Enterprise (HPE). These include a Zeiss Orion Helium Ion Microscope/Nanofab, FEI Helios DualBeam Focused Ion Beam (FIB), ASM Atomic Layer Deposition (ALD) tool, and a Clustex Multi-target deposition tool. The facility also has recently received $1.5 M from the Texas A&M University Research Development Fund to purchase an Oxford Estrelas DRIE tool and Heidelberg MLA150 Maskless Lithography tool to provide advanced substrate development capabilities. The main supporters of the facility are the Department of Electrical and Computer Engineering, TEES, and the Office of the Vice President for Research.