University of Maine

Contact Info:

Henry Carfagno

https://umaine.edu/core/cleanroom/

Grants and Identifiers:

RRID: RRID:SCR_028249

Instrumentation:

Services Provided:

Relevant Publications:

Description:

Facility supports micro- and nanoscale fabrication, microsensor development, and atomic-scale materials synthesis. Provides comprehensive technical capabilities, including microlithography (mask aligners, photoresist processing, laser lithography), thin film deposition (e-beam evaporation, sputtering, PECVD, atomic layer deposition), and advanced characterization tools (profilometry, spectroscopic ellipsometry). Fabrication processes are supported by both dry etching (DRIE, RIE) and wet chemical processing (RCA clean, KOH etch, solvent benches), as well as thermal processing systems such as diffusion furnaces and rapid thermal annealing.