Facility Details

NU Fabrication (NUFAB) has cleanroom facilities in Cook Hall and the Tech Institute. NUFAB_Tech contains state-of-the-art equipment for characterization, deposition, etching-ashing, photolithography and wet processing in newly-built 6000 square-foot class 100 and class 1000 cleanrooms. It supports research in all areas of science, engineering, medicine, and interdisciplinary fields. It provides nanofabrication equipment and technical expertise to Northwestern as well as other academic and industrial researchers.