University of Kansas
Contact Info:
Ryan Grigsby
1567 Irving Hill Road
GLH Room 1180
Lawrence, KS 66045
Grants and Identifiers:
RRID: RRID:SCR_028756
Other Citation Identifiers5P30GM145499-04
Instrumentation:
Cascade Microtech RHM-06
Probe Station with 4 probes, oscilloscope, function generator, DMM, and Precision Source
Services Provided:
Inductively Coupled Plasma Reactive Ion Etching
Plasma-Enhanced Chemical Vapor Deposition
Polydimethylsiloxane (PDMS) Microfluidics
Scanning Electron Microscopy (SEM) - Elemental Analysis (EDS)
Scanning Electron Microscopy (SEM) - Variable Pressure
Relevant Publications:
Description:
The University of Kansas Nanofabrication Facility (KUNF) is a Core Lab supported by the KU Office of Research and the Center for Molecular Analysis of Disease Pathways COBRE. The KUNF primarily caters to researchers who are manufacturing micro- and nanofluidic devices for biomedical research, but has the equipment and resources to also accommodate broad research applications with micro- and nanofabrication needs. The facility consists of about 1,300 ft2 of ISO class 5, 1,700 ft2 of ISO class 6 and 1,250 ft2 of ISO class 7 cleanroom space, housing tools and materials for techniques including photolithography, nano-imprint lithography, plasma (dry) etching (ICP-RIE), wet etching, thin film deposition, scanning electron microscopy (VP-SEM), atomic force microscopy, contact angle goniometry, ellipsometry, profilometry, wafer dicing, wire bonding, laser ablation and engraving, 3D printing, hot embossing, and COMSOL software for device modeling. In addition, the facility has numerous microscopes for general inspection, ovens and furnaces, ultrapure water, and dedicated process fume hoods. Services and usage of the facility are available to researchers from all Kansas universities. Training is provided to new investigators and graduate students in the use of micro- and nanofabrication procedures and equipment. In addition, researchers from both non-Kansas academic and private industry institutions may contract with the facility for consultation and services, including access to the facility. Hourly and per-use rates apply for facility access, equipment usage, and staff labor. Consultation is free.
